High Accuracy Measurement Capability – MarSurf FI 1100 Z

Unsurpassed Flexibility & Versatility

MarSurf-FI-1100-ZThe MarSurf FI 1100 Z interferometer provides non-contact measurement of flat or spherical surfaces along with transmitted wavefront measurements of optical components and assemblies. Measurements may be made using basic visual fringe inspection, static fringe analysis, or phase-modulated interferogram analysis. The MarSurf FI 1100 Z may be integrated with Mahr-ESDI’s world-renowned MarSurf FI 1100 Z acquisition and analysis software to provide the end user with superior measurement and analysis capability. The MarSurf FI 1100 Z provides the versatility and flexibility to handle today’s advanced applications with an unrivaled cost – performance benefit.

Data Sheet (PDF)

Setup Guide (PDF)


  • Measurement of flat, concave or convex surfaces
  • Prism, corner cube, wedge angle & homogeneity measurements
  • Measurement of machined, ceramic, and wafer/disk surfaces
  • Wavefront analysis of optical systems & components
  • Integration into OEM systems


  • Excellent versatility, stability and repeatability
  • 1x to 6x zoom, focus and attenuation controls
  • Vibration-insensitivity may be accomplished via Mahr-ESDI’s IntelliPhase™ static spatial carrier acquisition and analysis software
  • Compact, lightweight and rugged design
  • Compatible with all industry standard 4″ (100mm) reference optics and accessories
  • High accuracy measurements at an affordable price
  • Configurations include horizontal, vertical look up and vertical look down
  • Optional workstations for flat and short to long radius of curvature measurements